Basic Training on TCAD Sentaurus Tools
  

OVERVIEW

SENTAURUS WORKBENCH: The class covers the basics of this framework tool that allows organization of parameterized TCAD simulations in a single project with many possible splits, or branches.

LIGAMENT: Users will be introduced to this high level, simulator independent, GUI that combines mask layouts and process flows to generate process simulator specific input files.

SENTAURUS PROCESS: Users will learn the specifics of this process simulation tool, in terms of syntax and introduction of various models to simulate fabrication process flows.

SENTAURUS STRUCTURE EDITOR: The class will show you how to create 2D and 3D device structures, import structures from a prior process simulation step, make boundary simplifications and properly mesh structures for any subsequent device simulations.

SENTAURUS DEVICE: The class covers the basics how to simulate the electrical characteristics of devices created with SENTAURUS PROCESS and/or SENTAURUS STRUCTURE EDITOR.

TECPLOT_SV & INSPECT: Users will be taught how to visualize the structures and results generated from the process and device simulations, using these tools.

OBJECTIVES

At the end of the course you should be able to:

• Run parameterized process and device simulations
• Visualize simulated doping profiles, structure boundaries and materials, I-V curves and internal device characteristics such as carrier densities, current densities, and electric fields.
• Successfully combine mask layouts and process flows to perform simulations of fabrication processes involving single or multiple semiconductors, insulators and metals.
• Select proper models for the simulation of fabrication processes and electrical behavior of devices
• Properly mesh structures for adequate simulations
• Perform AC analyses of RF parameters

AUDIENCE PROFILE

TCAD engineers

PREREQUISITES

To benefit the most from the material presented in this course, you should have a good understanding of the physics involved in the fabrication process of microelectronic devices and/or microelectronic device physics.

COURSE OUTLINE

Day 1

1- Tool Overview

  • What is TCAD?
  • TCAD Tool Overview

2 – SENTAURUS WORKBENCH
  • Getting Started
  • Running a Project
  • Creating a New Project
  • Building Multiple Experiments
  • Miscellaneous Features
3 – Process simulation - LIGAMENT
  • Getting Started
  • LIGAMENT Flow Editor LIGEDIT
  • LIGAMENT Layout Editor PROLYT
  • Running LIGAMENT in SENTAURUS WORKBENCH
4 – Process simulation I – SENTAURUS PROCESS
  • Getting Started
  • 1D Process Simulation
  • 2D Process Simulation
  • Changing Parameters and Models


Day 2


5 – Process simulation II - SENTAURUS PROCESS

  • Working with a Custom Calibration File
  • Working with SENTAURUS PROCESS Advanced Calibration
  • SENTAURUS PROCESS under SENTAURUS WORKBENCH and LIGAMENT


6 – Process simulation III - SENTAURUS PROCESS
  • Custom Models with Alagator
  • Special Focus: STI Trench Etching
  • Special Focus: Meshing with MGOALS

7 – Structure editing, (Re)Meshing I – SENTAURUS STRUCTURE EDITOR
  • Getting Started
  • Generating 2D Boundaries
  • Generating Doping Profiles
  • Generating Meshes
  • Scripting and Parameterization
8 – Structure editing, (Re)Meshing II - SENTAURUS STRUCTURE EDITOR
  • Three-Dimensional Structures
  • Process Emulation Mode

Day 3
9 – Device simulation I - SENTAURUS DEVICE

  • SENTAURUS DEVICE Basics
  • Quasistationary and Transient simulations
  • Parameter file

10 – Device simulation II - SENTAURUS DEVICE
  • Carrier Transport Models
  • Mixed-mode SENTAURUS DEVICE
  • AC analysis

11 – Device simulation III - SENTAURUS DEVICE
  • Advanced Examples
  • Simulations of heterostructures or power devices
  • SENTAURUS DEVICE at Runtime
  • Solving convergence problems in SENTAURUS DEVICE

12 - Visualization tools - INSPECT & TECPLOT_SV
  • Visualization of X-Y plots and post processing of results
  • Visualization of 2D and 3D structures along with simulation results

SYNOPSYS TOOLS USED
SENTAURUS WORKBENCH, LIGAMENT, SENTAURUS PROCESS, SENTAURUS STRUCTURE EDITOR, MESH, SENTAURUS DEVICE, TECPLOT_SV, INSPEC